May 5, 2006
SemiChill Series provides up to 10 kW of cooling power and an operating temperature range of -4 to 266oF (-20 to 130oC). The recirculating coolers are designed for demanding industrial chilling applications such as etching tools, stainless steel chucks, cvd, pvd, sputtering, wet benches, and probers. Features include options for pumps and control electronics implemented in a space-saving tower version design.
Julabo USA Inc.