Monolithic AlN Chiller Technology for Semiconductors
Chiller-technology-based aluminum nitride (AlN) ceramic heater was developed with an embedded tungsten RTD sensor. This extreme ceramic chiller/heater is capable of heating from 212 to 842°F (100 to 450°C) at 360°F (200°C) per second and cooling from 842 to 212°F (450 to 100°C) at 180°F (100°C) per second. The high thermal conductivity and low temperature expansion properties of aluminum nitride enable the fast temperature response. Applications for fast heat/cool chillers are common in semiconductor equipment and analytical instrumentation.